Figure 5From: Influence of squeeze-film damping on higher-mode microcantilever vibrations in liquidNormalized eigenfrequencies and quality factors. (a) Eigenfrequencies and (b) quality factors of a microcantilever, vibrating at different gaps g to a surface. All values were normalized to the values measured far from the surface. The means ± SD are shown (N = 3).Back to article page