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Table 1 Vacuum frequencies, added mass coefficients and damping coefficients measured far from the surface (mean ± SD)

From: Influence of squeeze-film damping on higher-mode microcantilever vibrations in liquid

Mode n f n,vac /kHz a m,H »1 cH »1/mPa · s
1 44.8 ± 5.4 9.17 ± 0.20 67.8 ± 1.6
2 277 ± 15 6.78 ± 0.03 116.2 ± 11.1
3 768 ± 34 5.75 ± 0.01 186.7 ± 4.43
4 1512 ± 52 5.05 ± 0.01 372.0 ± 26.9