From: Influence of squeeze-film damping on higher-mode microcantilever vibrations in liquid
Mode n | f n,vac /kHz | a m,H »1 | cH »1/mPa · s |
---|---|---|---|
1 | 44.8 ± 5.4 | 9.17 ± 0.20 | 67.8 ± 1.6 |
2 | 277 ± 15 | 6.78 ± 0.03 | 116.2 ± 11.1 |
3 | 768 ± 34 | 5.75 ± 0.01 | 186.7 ± 4.43 |
4 | 1512 ± 52 | 5.05 ± 0.01 | 372.0 ± 26.9 |