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Figure 1 | EPJ Techniques and Instrumentation

Figure 1

From: A microfluidic AFM cantilever based dispensing and aspiration platform

Figure 1

Cantilever types. The chip contains an on-chip fluidic reservoir on the top side, which leads to the fluidic system and the hollow cantilever located on the back side of the chip. Although the microfabrication process was the same, two different types of hollow cantilevers were used for these experiments: (a) type-A had an outer width of 42 μm and (b) type-B had two legs with an outer width of 6.4 μm each. In both cases, the hollow Si3N4 tip had a wall thickness of 200 nm, over which an aperture of 750 nm was milled.

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