Table 1 Characteristics of the hollow cantilever and microfluidic cantilever-based platform
From: A microfluidic AFM cantilever based dispensing and aspiration platform
Parameter | Units |
|---|---|
Cantilever | |
Cantilever dimensions (each leg) | Type-A: L:155 μm, W:42 μm, T:4.9 μm Type-B: L:155 μm, W:6.4 μm, T:4.9 μm |
Channel dimensions (each leg) | Type-A: L:153.5 μm, W:40 μm, T: 2.2 μm Type-B: L:153.5 μm, W:3.7 μm, T: 2.2 μm |
Spring constant | Type-A: 2.4 N/m (when empty); Type-B: 9.4 N/m (when empty) |
Resonance frequency | Type-A: 153.94 kHz (when empty); Type-B: 110 kHz (when empty) |
Aspiration and dispensing flow rate | 50 fL/s @1.5 bars |
External dispenser | |
Pressure range | 0.85 bars under pressure to 5.0 bar overpressure; 0.01 bar resolution |
Settling time at dispenser out | <100 ms |
Climate control | |
Temperature range | Ambient to 40°C ±0.5 |
Humidity range | 30% – 90% RH ±5% non condensing 90% – 100% RH ±5% condensation |
Substrate alignment | |
Alignment accuracy | Between chip positions on the same substrate: <1 μm Between different chips: <2 μm |