Table 1 The dependence of surface roughness on the etching voltages
From: Fabrication of ion-trap electrodes by self-terminated electrochemical etching
Voltage(V) | Ra(nm) | Rq(nm) | Rt(nm) |
|---|---|---|---|
1 | 145 | 183 | 1096 |
2 | 88.9 | 116 | 964 |
3 | 40.5 | 50.9 | 375 |
4 | 18.8 | 24.8 | 171 |
5 | 17.3 | 22.4 | 189 |
6 | 6.63 | 8.72 | 67.8 |
7 | 9.6 | 16.0 | 246 |
8 | 47 | 63.8 | 1787 |
10 | 182 | 255 | 2086 |
12 | 110 | 143 | 988 |
14 | 306 | 376 | 1728 |