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Fig. 2 | EPJ Techniques and Instrumentation

Fig. 2

From: An interferometric force probe for beam diagnostics and the study of sputtering

Fig. 2

The drawing of the essential parts shows that a force \(\vec {F}\) acting at the target is related to a displacement \(\vec {d}\) of the mirrors. The indexed components \(\vec {d_{1}}\) and \(\vec {d_{2}}\) of the displacement are measured through the two sensor optics and correspond to the two indexed force components \(\vec {F_{1}}\) and \(\vec {F_{2}}\). The forces, the target normal \(\vec {n}\), and the incidence angle α of the beam belong to the same plane sketched by a dotted circle

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