Fig. 3
From: An interferometric force probe for beam diagnostics and the study of sputtering
Mechanical oscillations of the cantilever and its damping. a Lissajous curves made up from the displacements measured by the two sensors during two seconds. b Sketch of the eddy current damping parts. c Frequency spectra of the displacements measured by the two sensors without damping and d with damping. The insets show the marked regions, respectively, with ten times enlarged amplitudes