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Fig. 5 | EPJ Techniques and Instrumentation

Fig. 5

From: An interferometric force probe for beam diagnostics and the study of sputtering

Fig. 5

Calibration measurement. The abscissa represents the force exerted by certified weights. The displacements d1 and d2 of the two sensor axes are plotted as well as the magnitude of their calculated vector sums \(d = \left |\vec {d_{1}}+\vec {d_{2}}\right |\). The slope of the regression line for the vector sums yields the calibration constant k=23.4 N m −1. Note the different slopes of the lines for two sensors, which result from a small rotation of the calibration setup about the cantilever axis; this small misalignment has no effect on the vector sum, the (calculated) misalignment angle is approximately 3°

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