Fig. 6
From: An interferometric force probe for beam diagnostics and the study of sputtering
Application of the force probe. a Top view of the vacuum chamber used for the example measurements. The tilt angle α indicates the rotation of the platform with the force probe. This angle is the angle of incidence of the ions emitted from the ion source that impact at the force probe target. b Scanning electron microscopy image of the carbon fiber velvet. c Force probe with beam shutter. The drawing shows the setup with the blade iris half open (gray shaded) from behind. (This optional device is not used in the example measurements)