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Fig. 7 | EPJ Techniques and Instrumentation

Fig. 7

From: An interferometric force probe for beam diagnostics and the study of sputtering

Fig. 7

Time series of the displacements measured along the two sensor axes with a copper target, a and b. The shaded time spans indicate when the ion beam is switched on and exerts a force on the probe target. The horizontal lines are averages for the respective time spans. The angle of incidence is 45°. The difference between a measurement with and without the eddy current damping system is shown in (c) and (d), respectively. In this case, the angle of incidence is 0° (perpendicular incidence), and only the signals from sensor 1 are displayed. Note the overshooting in case of the undamped probe. The kinetic energy of the argon beam particles is 1.2 keV in all measurements

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