Fig. 3From: The planar Multipole Resonance Probe: a functional analytic approachThe pMRP consists of two circular half-disc electrodes \(\mathcal {E}_{1/2}\) with radius RS integrated into the chamber wall. A dielectric \(\mathcal {D}\) covers the electrodes and the chamber wall. The sheath \(\mathcal {S}\) in front of the dielectric separates it from the plasma \(\mathcal {P}\)Back to article page