Table 3 Specifications of Newport® Motion Stage TRA6PPV6 (from data sheet)
From: Thrust measurement and thrust balance development at DLR’s electric propulsion test facility
Parameter | Value |
|---|---|
Travel Range | 25 mm |
Maximum Speed | 1.25 mm/s |
Minimum Incremental Motion | 100 nm |
Accuracy, Typical | ±1.0 μm |
Accuracy, Guaranteed | ±3.0 μm |
Uni-directional Repeatability, Typical | ±0.08 μm |
Uni-directional Repeatability, Guaranteed | ±0.15 μm |
Bi-directional Repeatability, Typical | ±0.2 μm |
Bi-directional Repeatability, Guaranteed | ±1.0 μm |
Drive Type | DC Motor |
Origin Repeatability | ±2.5 μm |
Vacuum Compatibility | 10−6 hPa |
Weight | 0.73 kg |