Figure 1

(a) Perforated target holder (1 mm holes) with free-standing titanium film and its magnification, showing the high planarity of the substrates; (b) scheme of the fishing procedure and pictures of a floating 200 nm copper film; (c) 200 nm copper (left) and 50 nm aluminum (right) films laying down on the target holders; (d) SEM cross section images of hybrid DCMS and HiPIMS titanium, DCMS copper and biased (100 V) HiPIMS aluminium (from up to bottom); (e) side-by-side comparison of the effect of different titanium substrate thickness (200 nm and 400 nm, reported on top) on low-density carbon foam deposition, with magnifications