Table 1 Factors that influence damping in miniaturized mechanical resonators
From: Design strategies for controlling damping in micromechanical and nanomechanical resonators
Operation | Structure | Materials | Processing |
|---|---|---|---|
Mode | Shape | Chemistry | Deposition |
Frequency | Size | Alloying | Patterning |
Temperature | Architecture | Residual stress | Etching |
Pressure | Supporting frame | Microstructure | Bonding |
Transduction | Â | Defects | Annealing |
| Â | Surfaces | Interconnection | |
| Â | Â | Interfaces | Packaging |