From: Design strategies for controlling damping in micromechanical and nanomechanical resonators
Boundary damping | Fluid–structure interactions | Material damping | |||
---|---|---|---|---|---|
Elastic wave radiationâ– | Viscous dampingâ– | Thermoelastic dampingâ– | |||
Microsliding▲ | Squeeze-film damping■| Phonon-phonon interactions§ | |||
Viscoelasticity▲ | [9] | Acoustic radiation■| [68] | Phonon–electron interactions§ | |
Internal flowâ– | Internal Frictionâ–² |