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Table 2 Classification of linear damping mechanisms

From: Design strategies for controlling damping in micromechanical and nanomechanical resonators

Boundary damping Fluid–structure interactions Material damping
Elastic wave radiation [2039] Viscous damping [4042] Thermoelastic damping [4359]
Microsliding [6063] Squeeze-film damping [16, 64] Phonon-phonon interactions§ [6567]
Viscoelasticity [9] Acoustic radiation [68] Phonon–electron interactions§ [6, 65]
Internal flow [69, 70] Internal Friction [4, 5, 7184]