From: Design strategies for controlling damping in micromechanical and nanomechanical resonators
Material | E (GPa) | ρ(kg/m3) | k(W/m/K) | α(K-1) | C(J/m3/K) | v (m/s) | γ |
---|---|---|---|---|---|---|---|
Aluminum | 70 | 2.7 × 103 | 220 | 24.0 × 10-6 | 2.4 × 106 | 5.1 × 103 | 1.7 |
Copper | 120 | 8.9 × 103 | 400 | 20.0 × 10-6 | 3.8 × 106 | 3.6 × 103 | 1.9 |
Gold | 82 | 1.9 × 104 | 320 | 15.0 × 10-6 | 2.5 × 106 | 2.1 × 103 | 2.9 |
Nickel | 210 | 8.9 × 103 | 92 | 13.0 × 10-6 | 3.9 × 106 | 4.8 × 103 | 1.8 |
Silicon | 160 | 2.3 × 103 | 150 | 2.6 × 10-6 | 1.6 × 106 | 8.3 × 103 | 0.4 |
Silicon carbide | 400 | 3.2 × 103 | 70 | 3.0 × 10-6 | 3.0 × 106 | 1.1 × 104 | 1.1 |
Silicon oxide | 70 | 2.2 × 103 | 1 | 0.5 × 10-6 | 1.5 × 106 | 5.6 × 103 | 1.9 |
Silicon nitride | 250 | 3.2 × 103 | 8 | 3.0 × 10-6 | 3.0 × 106 | 8.8 × 103 | 1.2 |
Silver | 76 | 1.1 × 104 | 430 | 18.0 × 10-6 | 3.0 × 106 | 2.7 × 103 | 2.4 |