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Table 1 Factors that influence damping in miniaturized mechanical resonators

From: Design strategies for controlling damping in micromechanical and nanomechanical resonators

Operation Structure Materials Processing
Mode Shape Chemistry Deposition
Frequency Size Alloying Patterning
Temperature Architecture Residual stress Etching
Pressure Supporting frame Microstructure Bonding
Transduction   Defects Annealing
  Surfaces Interconnection
   Interfaces Packaging