Reference distance [mm] | Measurement range\(^{(a)}\) [mm] | Minimum spot size\(^{(b)}\) [mm] | Linearity [mm] | Repeatability [μm] | Sampling frequency [μs] | Dimension [mm3] | Weight\(^{(c)}\) [g] |
---|---|---|---|---|---|---|---|
10 | ± 1 | 0.02 | ± 0.0003 | 0.02 | 20–1000 | 54 × 73 × 27 | 90 |
30 | ± 5 | 0.03 | ± 0.0025 | 0.05 | 20–1000 | 85 × 77 × 26 | 280 |
80 | ± 15 | 0.07 | ± 0.0075 | 0.2 | 20–1000 | 95 × 76 × 36 | 380 |
150 | ± 40 | 0.12 | ± 0.02 | 0.5 | 20–1000 | 83 × 77 × 34 | 290 |
400 | ± 100 | 0.29 | ± 0.05 | 2 | 20–1000 | 108 × 86 × 37 | 380 |
500 | −250 to +500 | 0.30 | ± 0.1 to ± 0.5 | 2 | 20–1000 | 108 × 86 × 37 | 380 |