Table 1 Comparison of the control and monitor system before and after renovation
From: Update of high voltage isolation control and monitoring system for HVE-400 ion implanter
Comparison item | Before renovation | After renovation |
|---|---|---|
Structure | Decentralized single point control | Decentralized centralized |
Number of optical fibers | 20 | 4 |
Signal processing | Discrete component circuit board | Functional module |
Operation interface | Mechanical panel | PC GUI |
Mass number calculation | Hardware implementation | Software implementation (B or I) |
Operational stability | Unstable(Aging) | Stable |
Maintenance convenience | Complex | Simple |