Table 2 Parameters for the employed silicon cantilevers immersed in water
From: Influence of squeeze-film damping on higher-mode microcantilever vibrations in liquid
Cantilever properties | ||
|---|---|---|
L | Length | 250 μm |
b | Width | 35 μm |
h | Thickness | 2 μm |
ρ c | Mass density | 2330 kg · m−3 |
μ c | Mass per unit length | 0.163 mg · m−1 |
E | Young’s modulus | 169 GPa |
I | Area moment of inertia | 23.3 μm4 |
Q n | Quality factor of mode n | |
f n | Eigenfrequency of mode n | Hz |
f n,vac | Vacuum frequency of mode n | Hz |
a m | Added mass coefficient | |
c | Damping per unit length | Pa · s |
Fluid properties | ||
ρ f | Mass density | 998.25 kg · m−3 |
η f | Viscosity | 1.005 mPa · s |
Gap properties | ||
g | Gap | m |
H = g/b | Normalized gap | |